Industrial Air Solutions

Microelectronics parts and semiconductors are manufactured and measured in nanometres. Without high-efficiency filtration, manufacturing these nano circuits would be impossible: even the smallest dust particle can disrupt their function.

Contamination control for microelectronics relies on a staged filter chain:

  • Coarse and fine filters as pre-stages in make-up air and recirculation systems.
  • HEPA and ULPA filters as the final stage, ensuring that even the smallest particles are captured and a contamination-free environment is provided.

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INDUSTRIES

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Tell us about your facility and requirements. We will prepare a filtration concept for your application.